Buffer units, substrate processing apparatuses, and substrate processing methods

摘要

Provided is a buffer unit, which includes a frame including a base plate, a first vertical plate, and a second vertical plate, wherein the first and second vertical plates are spaced apart from each other on the base plate, a first buffer on which a photomask is placed, the first buffer being allowed to be reversed between the first and second vertical plates; and a plurality of driving parts disposed at outsides of the first and second vertical plates, and driving the first buffer to grip and reverse the photomask placed on the first buffer.

主权项

1. A buffer unit comprising:
a frame including a base plate, a first vertical plate, a second vertical plate, and a plurality of partition covers that cover outer surfaces of the first and second vertical plates, wherein the first and second vertical plates are spaced apart from each other on the base plate; a plurality of first buffers on each of which a substrate is placed, each of the plurality of first buffers configured to be reversed between the first and second vertical plates, each of the plurality of first buffers including a first support and a second support, the first support configured to support a surface of the substrate, the second support facing the first support and configured to support an another surface of the substrate; and a plurality of driving parts within a driving part space, the driving part space being entirely outside the first and second vertical plates, the plurality of driving parts including a rotation module and an elevation module, the rotation module configured to rotate the first buffer, the elevation module configured to vertically move the second support such that the substrate is gripped by the first and second supports, and the plurality of driving parts each configured to drive the first buffer to grip and reverse the substrate placed on the first buffer, wherein the driving part space is a space enclosed by the base plate and a pair of one of the first vertical plate and the second vertical plate and one of the plurality of partition covers, and the driving part space includes two or more of the driving parts.