Coupling devices and source assemblies including them

摘要

Certain embodiments described herein are directed to couplers that can be used to provide a seal between a source assembly and a vacuum chamber. In certain examples, the seal can be provided upon movement of a moveable component of the coupler. In some examples, rotation of the moveable component is operative to provide an axial force to a stationary component coupled to the moveable component such that the stationary component is biased to provide a suitable seal to the vacuum chamber.

主权项

1. A source assembly comprising a source configured to couple to a vacuum port of a vacuum chamber of an instrument comprising a first pin and a second pin each extending radially from the instrument, the source assembly comprising:
a moveable component comprising a circumferential slot; a stationary component comprising the source, in which the source comprises a plurality of lenses; in which the stationary component further comprises a slot that is configured to receive the first in and the second in of the instrument into the slot of the stationary component to align the source in the instrument when the first and second pins engage the slot of the stationary component; in which the moveable component is configured to provide an axial force to the stationary component upon rotational movement of the moveable component in a first direction by compression of a spring, in which the moveable component is further configured to release the provided axial force upon rotational movement of the moveable component in a second direction opposite the first direction; and in which rotational movement of the moveable component in the first direction is configured to engage the second pin in the circumferential slot of the moveable component to lock the stationary component in place and compress the spring to thereby provide a substantially fluid tight seal between the source and the vacuum chamber.