发明名称 VIEW PORT AND INGOT GROWING APPARATUS INCLUDING THE SAME
摘要 The present invention relates to a view port and an ingot growing apparatus comprising the same. The view port comprises: a body part communicated with an inner chamber; a first window arranged on the body part and transmitting lights inputted from the outside of the chamber; a window purge mounting the first window and forming an air curtain by using gas sprayed internally; and a second window disposed between the window purge and the body part and fixed by an intermediate structure. It is possible to prevent contamination sources from being deposited to the inner wall of the chamber and the first window as the flow of the sprayed gas is circulated easily in a lower portion of the first window, and the sprayed gas is concentrated to be discharged into the inner chamber through the second window.
申请公布号 KR20160081398(A) 申请公布日期 2016.07.08
申请号 KR20140195175 申请日期 2014.12.31
申请人 LG SILTRON INCORPORATED 发明人 KIM, JUNG YUL;PARK, HYUNG KOOK
分类号 C30B15/26;C30B15/00;C30B29/06 主分类号 C30B15/26
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