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发明名称
Verfahren und Anordnung zur Justierung des Elektronenstrahlbuendels in einem Elektronenmikroskop
摘要
申请公布号
DE1903498(C2)
申请公布日期
1971.01.14
申请号
DE19691903498
申请日期
1969.01.24
申请人
FA.CARL ZEISS
发明人
GUETTER,DR.ERNST
分类号
H01J37/147
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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