ETCHING METHOD OF SEMICONDUCTOR MATERIAL,申请号JP19760136045-传众专利搜索

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发明名称	ETCHING METHOD OF SEMICONDUCTOR MATERIAL
摘要
申请公布号	JPS5360580(A)	申请公布日期	1978.05.31
申请号	JP19760136045	申请日期	1976.11.11
申请人	NIPPON ELECTRIC CO	发明人	MATSUO MASANORI
分类号	C23F1/10;C23F1/02;H01L21/306	主分类号	C23F1/10
代理机构		代理人
主权项
地址

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