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发明名称
摘要
申请公布号	FR2295561(B1)	申请公布日期	1979.06.22
申请号	FR19750038382	申请日期	1975.12.15
申请人	AIRCO INC	发明人
分类号	C23C14/34;C23C14/36;H01J37/34;(IPC1-7):H01J37/34;C23F15/00	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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