| 摘要 |
PURPOSE:To avoid the contamination of laser gas in a sealed laser tube of triple tube structure having a gas reservoir at the outermost side due to diffused gas from a wall by connecting a discharge tube of innermost side and the reservoir through a connecting passage and providing a baking auxiliary electrode at a part of the reservoir. CONSTITUTION:An output coupling mirror 2 and a total-reflection mirror 2' are respectively opposed at laser tube windows 11, 11' at both sides of a discharge tube 1, and a laser light 3 is emitted from the side of the mirror 2. The outer periphery of the tube 1 is enclosed by a jacket 7 which has a coolant exit and inlet 8, 8', and a gas reservoir 10 is formed on the outer periphery. In this structure, a passage 9 which communicates with the tube 1 is provided to the reservoir 10, a DC high voltage power source 6 is connected to an electrode 5' in the side branch 4' for the electrode of the tube 1 and an electrode 5 in a side branch 4 for the electrode of the reservoir 10, and a discharge is produced in the tube 1. Further, an auxiliary electrode 12 is provided at the reservoir 10, a discharge is produced in the reservoir 10, and the tube 1 is sufficiently baked. |
