发明名称 Fabrication method of bipolar transistor
摘要 Present invention relates to the fabrication method of the bipolar transistor. With this method the emitter of high-concentrated n-type is contacted closely to the extrinsic base of high-concentrated p-type. This structure is obtained by making the emitter of the bipolar transistor be self- aligned by the side wall under-cut of the nitride layer using double layers of the low temperature oxide and the nitride layer.
申请公布号 US4874712(A) 申请公布日期 1989.10.17
申请号 US19880249401 申请日期 1988.09.26
申请人 SAMSUNG SEMICONDUCTOR & TELECOMMUNICATION CO., LTD. 发明人 KIM, MYUNG S.;KANG, HYUN S.;LIM, SOON K.;PARK, HEE K.
分类号 H01L29/73;H01L21/266;H01L21/331;H01L29/732 主分类号 H01L29/73
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