| 摘要 |
PURPOSE:To provide a space cleaning system in which the state of a space to be cleaned can be monitored at all times to keep it in an appropriate state, the safety of its atmosphere against human body be secured, its maintenance be automated, and the contamination against specific molecules be reduced even in an atmosphere using air. CONSTITUTION:The title system is equipped with detecting means 6 and 7 for detecting in a space such a substance that is harmful or useful for a processing substrate in the space among gases constituting the space to be cleaned, or a liquid or solid substance containing therein, a control means 10 for optimizing the detection quantity according to the detected quantity, and a means 13 for removing the harmful substances from the space or adding useful substances. |
