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发明名称
VERFAHREN FUER DAMPFNIEDERSCHLAG.
摘要
申请公布号
AT92113(T)
申请公布日期
1993.08.15
申请号
AT19890900684T
申请日期
1988.03.24
申请人
WEHNER, GOTTFRIED, K.
发明人
WEHNER, GOTTFRIED, K.
分类号
C23C14/34;H01L39/24;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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