| 摘要 |
PURPOSE:To independently adjust the axial position of a mirror holder which holds a laser light reflecting mirror and the angles on two axes crossing it at right angles. CONSTITUTION:A mirror unit 20 is supported on a movable member 10 through a swinging support mechanism 50 which freely swings in all directions and the movable member 10 is supported movably only in the direction of a Z axis 14 through a Z-axial guide mechanism 40; and a Z-axial position fine adjusting mechanism 60 finely adjust the Z-axial position of the movable member 10, a theta-axial angle fine adjusting mechanism 70 finely adjust the angle on a theta axis, and a phi-axial angle fine adjusting mechanism which is not shown in the figure finely adjusts the angle of a phi axis, crossing the theta axis at right angles, on the phi axis. |
