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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06252109(A)
申请公布日期
1994.09.09
申请号
JP19930038686
申请日期
1993.02.26
申请人
FUJITSU LTD
发明人
IWASAKI NOBUHITO
分类号
H01L21/304;H01L21/306;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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