| 摘要 |
PURPOSE:To regularly perform a comparatively precise measurement related to various ion concentrations and change thereof in a solution to be inspected by arranging a water repellent member around a sensor part and a comparing electrode, and arranging a hydrophilic member adjacent thereto. CONSTITUTION:This detecting device has a basically constituted FET, and an n-type source electrode 12 and a drain electrode 14 formed in a p-type silicon base 10 by thermal diffusing method. An ion sensitive gate film 20 (sensor part) is set in the gate part nipped by the electrodes 12, 14. The part other than the gate film 20 is covered with a hydrophilic member 22 such as SiO2 or SiNx. The circumference of the gate film 20 and a wiring 24 is further covered with a water repellent member 26. Thus, a solution to be inspected remaining in the comparing electrode 28 and the gate film 20 is repelled by the water repellent member arranged around them, and moved on the hydrophilic member 22 side. The unnecessary washed away of KC1 from the comparing electrode 28 by the remaining solution is suppressed, and the life of the device can be enhanced. |
