发明名称 |
METHOD OF OPTIMIZING MANUFACTURE AND PRODUCTION OF WORKPIECE |
摘要 |
<p>PROBLEM TO BE SOLVED: To suppress waste and inefficiency to a minimum by executing feedforward correction proceeding to a manufacturing process on the basis of the state of a half-finished product. SOLUTION: The ideal value is assigned to a parameter list corresponding to a finished product. A workpiece is subjected to a first manufacturing process in order to obtain a finished product satisfying the ideal value. The manufacturing process is monitored in order to confirm the state of a half-finished product to the ideal value. On the basis of the state of the half-finished product, feedforward correction proceeding is executed to the manufacturing process, and the workpiece is subjected to a corrected manufacturing process.</p> |
申请公布号 |
JPH1142537(A) |
申请公布日期 |
1999.02.16 |
申请号 |
JP19980123145 |
申请日期 |
1998.05.06 |
申请人 |
INTERNATL BUSINESS MACH CORP <IBM> |
发明人 |
KURTZBERG JEROME M;LEVANONI MENACHEM |
分类号 |
B23Q41/08;B65G61/00;G05B15/02;G05B19/418;G06Q50/00;H01L21/02;H01L21/822;H01L27/04;(IPC1-7):B23Q41/08;G06F17/60 |
主分类号 |
B23Q41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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