发明名称 METHOD OF OPTIMIZING MANUFACTURE AND PRODUCTION OF WORKPIECE
摘要 <p>PROBLEM TO BE SOLVED: To suppress waste and inefficiency to a minimum by executing feedforward correction proceeding to a manufacturing process on the basis of the state of a half-finished product. SOLUTION: The ideal value is assigned to a parameter list corresponding to a finished product. A workpiece is subjected to a first manufacturing process in order to obtain a finished product satisfying the ideal value. The manufacturing process is monitored in order to confirm the state of a half-finished product to the ideal value. On the basis of the state of the half-finished product, feedforward correction proceeding is executed to the manufacturing process, and the workpiece is subjected to a corrected manufacturing process.</p>
申请公布号 JPH1142537(A) 申请公布日期 1999.02.16
申请号 JP19980123145 申请日期 1998.05.06
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 KURTZBERG JEROME M;LEVANONI MENACHEM
分类号 B23Q41/08;B65G61/00;G05B15/02;G05B19/418;G06Q50/00;H01L21/02;H01L21/822;H01L27/04;(IPC1-7):B23Q41/08;G06F17/60 主分类号 B23Q41/08
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