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发明名称
THERMAL TREATMENT DEVICE
摘要
申请公布号
JPH11102914(A)
申请公布日期
1999.04.13
申请号
JP19970263973
申请日期
1997.09.29
申请人
SHIBAURA MECHATRONICS CORP
发明人
TAKIZAWA HIROTSUGU
分类号
C23C14/50;C23C14/54;H01L21/205;H01L21/22;H01L21/324;(IPC1-7):H01L21/324
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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