| 摘要 |
PROBLEM TO BE SOLVED: To obtain a practical sensor insusceptible to sun light, exhibiting high response, excellent in heat resistance and UV detection accuracy by providing a substrate, a UV ray detection layer of diamond film having a specified thickness grown with uniaxial orientation on the substrate by vapor phase synthesis, and at least a pair of electrodes touching the detection layer. SOLUTION: A diamond film 2 is formed on a substrate 1 and a pair of first and second electrodes 3, 4 are formed thereon. When UV-rays impinge on the surface of the diamond film 2, pairs of electron and hole are generated therein. They are detected by means of the first and second electrodes 3, 4 in order to detect UV-rays. The diamond film 2 is grown with uniaxial orientation by vapor phase synthesis and has thickness of 1-40 μm. Since the grain boundary density in the uniaxially oriented diamond film is significantly lower than that in a polycrystalline film of random orientation, electrons and holes generated upon receiving UV-rays migrate smoothly without being trapped resulting in the enhancement of UV-ray detection sensitivity. |
