| 摘要 |
A method and an apparatus for removing impurities from a noble gas or nitrogen utilizing a single purifier vessel having three zones. In the first zone, the gas is preheated to a temperature greater than 200 DEG C.; in the second zone, the preheated gas is contacted with a getter material at greater than 335 DEG C. for removal of impurities such as methane and other hydrocarbons, water, carbon monoxide, nitrogen, oxygen, and carbon dioxide; in the third zone, the gas is contacted with a second getter material at a temperature greater than 150 DEG C. for removal of hydrogen. Hot gas exiting the purifier vessel is passed through a recuperative heat exchanger where the hot exiting gas preheats in-coming gas before it enters the first zone of the purifier vessel.
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