| 摘要 |
PROBLEM TO BE SOLVED: To efficiently make adjustment of a mechanical position of a spectrometer and a projection lens. SOLUTION: In this electron microscope adjusting method, in an electron microscope projecting an observation image of a sample by inserting an energy filter at an intermediate portion of an image-formation lens system and passing it through a slit and a projecting lens such that an optical axis of an incident beam and an optical axis of an outgoing beam are arranged on a straight line, the electron microscope is provided with a wobbler circuit 4 generating a wobbler signal having a predetermined amplitude and a frequency. A mechanical position of a spectrometer and an adjustment of a projection lens are carried out based on an image deviation and a focus deviation at the time when a spectrometer excitation current is increased/decreased by the wobbler signal. The wobbler circuit 4 generates the wobbler signal having an amplitude reverse- proportioning to an electron rotation radius of a magnet of an energy filter 1 and can change an amplitude and a frequency. The amplitude is varied corresponding to an adjustment of a mechanical position and a projection lens and a frequency is varied corresponding to a delaying of a magnetic field.
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