| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermomicroelectric mechanical actuator having a small area which can realize an out-of-plane motion with a force equal to that of the conventional thermal actuators and operate with a voltage and a current, matching with a standard integrated circuit. SOLUTION: The actuator is constituted of first and second anchors fixed to a base board and a plurality of stretched thermal buckle beam parts fixed to a part between the anchors. The buckle beam part is formed of a semiconductor material such as polysilicon. The buckle beam part is coupled with a turning frame containing a frame base part fixed to each of the buckle beam parts and at least one turning arm containing a free end which is combined with the base frame part through one end and pivots outside a plane when the actuator is activated. A current source leads a current via the anchors and the buckle beam parts and transfers the thermal expansion of the buckle beam parts, i.e., a bending motion of the buckle beam parts to the outside surface of the base board.
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