发明名称 |
Method for making a wire nanostructure in a semiconductor film |
摘要 |
This invention relates to a process for manufacturing nanowire structures, the process comprising the following steps: manufacture of a thin semiconductor film ( 1 ) extending between a first terminal ( 4 ) and a second terminal ( 5 ), and passage of a current between the first and the second terminals so as to form at least one continuous overthickness (R 1 , R 2 , R 3 ) in the thin semiconductor film by migration of a fraction of the semiconductor material, under the action of the current, the continuous overthickness being formed along the direction of the current that passes through the film.
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申请公布号 |
US2006286788(A1) |
申请公布日期 |
2006.12.21 |
申请号 |
US20050529937 |
申请日期 |
2005.04.01 |
申请人 |
FRABOULET DAVID;GAUTIER JACQUES;TONNEAU DIDIER;CLEMENT NICOLAS;BOUCHIAT VINCENT |
发明人 |
FRABOULET DAVID;GAUTIER JACQUES;TONNEAU DIDIER;CLEMENT NICOLAS;BOUCHIAT VINCENT |
分类号 |
H01L21/84;H01L;H01L21/306;H01L21/308;H01L21/321;H01L21/326;H01L21/44;H01L23/525;H01L29/06 |
主分类号 |
H01L21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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