发明名称 Method for making a wire nanostructure in a semiconductor film
摘要 This invention relates to a process for manufacturing nanowire structures, the process comprising the following steps: manufacture of a thin semiconductor film ( 1 ) extending between a first terminal ( 4 ) and a second terminal ( 5 ), and passage of a current between the first and the second terminals so as to form at least one continuous overthickness (R 1 , R 2 , R 3 ) in the thin semiconductor film by migration of a fraction of the semiconductor material, under the action of the current, the continuous overthickness being formed along the direction of the current that passes through the film.
申请公布号 US2006286788(A1) 申请公布日期 2006.12.21
申请号 US20050529937 申请日期 2005.04.01
申请人 FRABOULET DAVID;GAUTIER JACQUES;TONNEAU DIDIER;CLEMENT NICOLAS;BOUCHIAT VINCENT 发明人 FRABOULET DAVID;GAUTIER JACQUES;TONNEAU DIDIER;CLEMENT NICOLAS;BOUCHIAT VINCENT
分类号 H01L21/84;H01L;H01L21/306;H01L21/308;H01L21/321;H01L21/326;H01L21/44;H01L23/525;H01L29/06 主分类号 H01L21/84
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