| 发明名称 |
CASE FOR HOUSING LARGE-SIZED PELLICLE |
| 摘要 |
A case for housing a large-sized pellicle having an area of 1000 cm 2 or more which is composed of a tray for housing a pellicle and a lid for covering the tray, wherein said lid and/or tray comprises a material having a honeycomb structure.
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| 申请公布号 |
KR20070093441(A) |
申请公布日期 |
2007.09.18 |
| 申请号 |
KR20077017339 |
申请日期 |
2007.07.27 |
| 申请人 |
ASAHI KASEI EMD CORPORATION |
发明人 |
KURIYAMA HOZUMA;WAKIMOTO ICHIRO;FUNATO AKIRA |
| 分类号 |
B65D85/86;H01L21/02 |
主分类号 |
B65D85/86 |
| 代理机构 |
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代理人 |
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| 主权项 |
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