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发明名称
曝光装置及装置制造方法
摘要
曝光装置透过液体使基体曝光,并且包括液体托盘,被组配成支托液体,和被排列在基体四周;及夹盘,被组配成支托基体,液体托盘的表面之至少部分和夹盘的表面之至少部分的至少其中之一系由聚对二甲苯树脂制成或包括一层改质聚对二甲苯树脂。
申请公布号
TW200736848
申请公布日期
2007.10.01
申请号
TW096103924
申请日期
2007.02.02
申请人
佳能股份有限公司
发明人
千叶启子
分类号
G03F7/20(2006.01);G03F7/30(2006.01);H01L21/027(2006.01)
主分类号
G03F7/20(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本
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