| 摘要 |
An electric comb driven micropump system includes a piston, a comb actuator comb and a real-time monitoring device. The comb actuator may generate an electrostatic force after receiving a voltage, so as to actuate the piston to make a first displacement, which causes a fluid to enter into a cavity, wherein the voltage has a voltage value for determining the volume of the fluid entering into the cavity, and wherein as the voltage value of the voltage gradually decreases, the electrostatic forces also decreases, allowing the piston to gradually make a second displacement in a direction opposite to the first displacement driven by a spring, thus outputting the fluid from the cavity. The real-time monitoring device provides real-time information of the comb actuator.
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