发明名称 DOUBLE-HEAD FLAT SURFACE GRINDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a double-head flat surface grinding device capable of smoothly advancing/retracting the cylinder rod of a cylinder when a workpiece holder is slid along a guide rod.SOLUTION: A first cylinder 35 and a second cylinder 45 advance/retract a first cylinder rod 37 and a second cylinder rod 47 to slide a first workpiece holder 30 and a second workpiece holder 40 along a guide rod 51. The tip part of the first cylinder rod 37 is fitted to the first workpiece holder 30 via a spherical bearing 55 so as to swing. A first cylinder body 36 is fitted to an inner case 8. The tip part of the second cylinder rod 47 is fitted to the first workpiece holder 30 via the spherical bearing 55 so as to swing. A second cylinder body 46 is fitted to the second workpiece holder 40.SELECTED DRAWING: Figure 3
申请公布号 JP2016132084(A) 申请公布日期 2016.07.25
申请号 JP20150010182 申请日期 2015.01.22
申请人 KOYO MACH IND CO LTD 发明人 SHIBANAKA ATSUSHI
分类号 B24B7/17;H01L21/304 主分类号 B24B7/17
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