| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor that has a Schottky barrier height corresponding to the work function of metal material used for a metal electrode.SOLUTION: A gas sensor 5 includes: a detection film 1 made of a two-dimensional semiconductor material of any one of MoS2, MoSe2, MoTe2, WS2, WSe2, black phosphorus, and BCN on a substrate 4; a graphene 2 partially contacting with the detection film 1; and a metal electrode 3 contacting with a side of the graphene 2 which is opposite to the side contacting with the detection film 1. Changing the responsibility by using various different materials for the metal electrode 3 provided to the detection film 1 of the two-dimensional semiconductor material can increase the number of types of detectable gases and improve the sensitivity to gases with concentrations around a ppb level.SELECTED DRAWING: Figure 1 |
