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发明名称
Verfahren zur Eindiffusion von Fremdatomen in Halbleiterkoerper mit hohem Dampfdruck
摘要
申请公布号
DE1544313(A1)
申请公布日期
1970.03.19
申请号
DE19641544313
申请日期
1964.11.27
申请人
TELEFUNKEN PATENTVERWERTUNGSGESELLSCHAFT MBH
发明人
FRIEDRICH-HELMUT DOERBECK,DIPL.-PHYS.
分类号
C23C16/40;C30B31/02;H01L21/00
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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