发明名称 Verfahren zum Behandeln einer Siliciumdioxydoberflaeche eines Halbleiterbauelementes
摘要 an exposed hydrophilic surface of silicon oxide is rendered hydrophobic by heating it to dry it, treating with dry benzene or ethane sulphonic acid, removing the excess of acid and drying the surface. Methyl, ethyl or isopropyl alcohol may be used to remove the excess of acid. A silicon dioxide surface is first heated to 138-160 DEG C. and then exposed to the sulphonic acid at either 80-130 DEG C. for benzene sulphonic acid or 30-50 DEG C. for ethane sulphonic acid. It is stated that a hydrophobic surface is produced by esterification of the surface OH groups with a sulphonate anion.
申请公布号 DE1567779(A1) 申请公布日期 1970.05.27
申请号 DE19651567779 申请日期 1965.08.27
申请人 RCA CORP. 发明人 ARTHUR POLINSKY,MURRAY;FREDERICK DAMON,GEORGE
分类号 H01L21/3105;H01L29/00 主分类号 H01L21/3105
代理机构 代理人
主权项
地址