发明名称 |
Second order correction in linearized proximity probe |
摘要 |
A system for reducing higher order nonlinearities in the linearized output of a dimension gauging probe in which the dimension gauging probe provides an output varying inversely with the physical dimension gauged which is in turn linearized to a signal varying proportionally with the physical dimension. Higher order nonlinearities, an error condition, which deviate the correspondence between the gauged dimension and the output from a linear or straight-line function, are reduced by feedback of the linearized output to the probe and, preferably, by feedforward of a portion of the probe output signal to the linearized signal.
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申请公布号 |
US4228392(A) |
申请公布日期 |
1980.10.14 |
申请号 |
US19770840852 |
申请日期 |
1977.10.11 |
申请人 |
ADE CORPORATION |
发明人 |
ABBE, ROBERT C.;PODUJE, NOEL S.;KLEIN, DANIEL |
分类号 |
G01R27/26;(IPC1-7):G01R27/26 |
主分类号 |
G01R27/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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