发明名称 ROLL COATER
摘要 PURPOSE:To apply a photo resist only on one side surface without smearing the back surface of a glass substrate, by providing a washing mechanism to a back- up roll when applying a photo resist on a glass substrate for an liquid crystal display element. CONSTITUTION:The glass substrate 1 goes between the coating roll 4 and back- up roll 7 by carrier belts 3 and advances by the rotation of the both rolls simultaneously being applied by the photo resist 2 on the upper surface thereof without coating, and the photoresist deposits on the back-up roll when the roll is under idling state. Since the next glass substrate is deposited by the photo resist both on front and back surfaces, a brush 8 to wash the back-up roll 7 is contacted with the back-up roll 7. Then, the washing liquid is sent from a pump 12 and squeezed down by a squeezing roll 13 after washing.
申请公布号 JPS587825(A) 申请公布日期 1983.01.17
申请号 JP19810104475 申请日期 1981.07.06
申请人 HITACHI SEISAKUSHO KK 发明人 MIYAZAKI KATSUHIRO;NAKAMURA TOSHIHARU;FUJITA SHIYOUJI;MUNAKATA MASANORI
分类号 G09F9/30;G03F7/16;H01L21/027 主分类号 G09F9/30
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