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发明名称
摘要
申请公布号	JPS6224943(B2)	申请公布日期	1987.05.30
申请号	JP19820210974	申请日期	1982.12.01
申请人	SEIKO DENSHI KOGYO KK	发明人	OOMURA KENJI;MYATA ISAO;YAMASHITA YOSHIHIRO;NODA MINORU
分类号	B65G47/90;B65G1/00;H01L21/67;H01L21/677	主分类号	B65G47/90
代理机构		代理人
主权项
地址

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