摘要 |
<p>A fine surface profile meter includes an X-Y stage, supported by a leaf spring, for supporting a sample thereon, a piezoelectric actuator for two-dimensionally scanning the X-Y stage, a positioning table, disposed below the X-Y stage, for positioning the X-Y stage at an arbitrary position, an objective lens disposed above the X-Y stage, an observation optical system for allowing an operator to observe an enlarged sample image, a measurement optical system, an optical axis of which is aligned with an optical path of the objective lens through a beam splitter, the measurement optical system for emitting a laser beam onto the sample through the objective lens and to receive the laser beam reflected by the sample, a calculator circuit for calculating height information of the sample using an output from the measurement optical system and for obtaining a two-dimensional distribution of the height information, a cover for shielding the X-Y stage, the positioning means, the objective lens, the beam splitter, the observation optical system, and the measurement optical system from an outer atmosphere, a detachable measurement unit for integrally holding the objective lens, the beam splitter, and the measurement optical system, a supporting plate supported on the X-Y stage through columns, and an arm, mounted on the supporting plate, for supporting the measurement optical system and the observation optical system.</p> |
申请人 |
OLYMPUS OPTICAL CO., LTD. |
发明人 |
SATO, EIICHI;KOSHIISHI, KIYOZO;SHIGETOMI, SADAO;TANAKA, SYUNPEI;YOSHINAGA, MAKOTO;MORITA, TERUMASA;NAGANO, CHIKARA;KOBAYASHI, SHOHEI;SATO, CHIAKI;TODA, AKITOSHI;KUBO, MITUNORI;TOFUKUJI, IKUO |