发明名称 METHOD FOR FIXATION OF SEMICONDUCTOR SUBSTRATE TO BOARD
摘要 PURPOSE: To provide a method for fixing a semiconductor substrate on which at least a semiconductor device is provided, without wasting time and requiring no complicated means when the semiconductor substrate/to be separated from a semiconductor wafer having a number of semiconductor substrates of the same type, is treated. CONSTITUTION: This semiconductor substrate 1 comprises semiconductor wafers 11 having a number of the same or similar parts, and the first contact layer 6 and a metal powder layer 10 are provided on the backside of the wafers 11. Then, the metal powder layer is sintered, the semiconductor wafers 11 are adhered to a sheet of adhesive foil, the semiconductor wafers 11 are saw-cut along the dividing line surrounding the divided semiconductor substrate, the adhered foil is separated from the divided semiconductor, and fixed to a substrate 7.
申请公布号 JPH04261028(A) 申请公布日期 1992.09.17
申请号 JP19910268781 申请日期 1991.09.20
申请人 SIEMENS AG 发明人 HERUBERUTO SHIYUWARUTSUBAUERU
分类号 H01L21/52;H01L21/301;H01L21/60;H01L21/68;H01L29/06 主分类号 H01L21/52
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