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发明名称
IMPURITY DOPING APPARATUS
摘要
申请公布号
US5199994(A)
申请公布日期
1993.04.06
申请号
US19900623164
申请日期
1990.12.06
申请人
SEIKO INSTRUMENTS INC.
发明人
AOKI, KENJI
分类号
H01L21/223;C30B31/00;H01L21/205;H01L21/22;H01L21/225
主分类号
H01L21/223
代理机构
代理人
主权项
地址
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