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发明名称
SEMICONDUCTOR TESTING DEVICE
摘要
申请公布号
JPH0685031(A)
申请公布日期
1994.03.25
申请号
JP19920257642
申请日期
1992.09.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAKAZURU KAZUHIRO
分类号
G01R31/26;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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