SEMICONDUCTOR ACCELERATION SENSOR

摘要

PURPOSE:To provide a semiconductor acceleration sensor in which leak current is prevented between a sensing element and a stripper to which voltage is applied when a drive voltage is applied for the purpose of self-diagnosis. CONSTITUTION:A recess 10 for preventing current leak between the semiconductor substrate parts of a sensing element A and an upper stopper B at the time of self-diagnosis by ensuring a sufficient spatial distance and creeping distance is formed around the upper stopper B on the joint face side thereof.