| 摘要 |
PURPOSE:To improve baking efficiency by placing ceramic electronic parts in baking saggers, making the saggers generate heat by induction heating while controlling the atmosphere in the saggers and increasing the temperature of the ceramic electronic parts to a prescribed temperature. CONSTITUTION:This method for baking ceramic electronic parts is to transfer baking saggers 1, made of SiC, etc., and containing ceramic electronic parts to a position corresponding to an induction heating means 2 with a belt 11, then connect each atmospheric gas supplying nozzle 5 and discharge nozzle 6 to a gas introducing port T and a gas discharge port 8 of each baking sagger l1, then supply and discharge an atmospheric gas, control, the atmosphere in the baking sagger 1, make the baking saggers 1 generate heat with the induction heating means 2, increase the temperature of the ceramic electronic parts to a prescribed temperature, bake the ceramic electronic parts, transfer the baking sagger 1 to the position corresponding to the next induction heating means 2 after baking for a prescribed time by a conveying means 3, heat the inside of the baking sagger 1 at a prescribed temperature in the next stage and bake the ceramic electronic parts. Thus, the parts are efficiently baked by controlling the temperature conditions and atmospheric conditions in the baking sagger 1. |
