| 摘要 |
<p>PROBLEM TO BE SOLVED: To enhance mechanical strength at the bridge part and the joint by forming a corrosion protection layer, a glass layer, a resistor of platinum pattern and an overcoat glass layer on a glass substrate and then removing the glass substrate and anti-corrosion layer from the underside of resistor to form a cavity. SOLUTION: A corrosion protection layer 12 having an etching stopper function, a glass layer 13, a platinum pattern (resistor) 14 and an overcoat glass layer 15 are formed sequentially on a glass substrate 11 which is then removed, along with the corrosion protection layer 12 from the underside of pattern 14 to form a cavity 17. Since the glass forming the substrate 11 and the layers 13, 15 has high mechanical strength, is enhanced at the thinnest bridge part (cavity 17) of sensor and the joint thereof to the substrate 11. When the glass layer 13 is set at about 10μm thick, the bridge part can be protected against fracture even if the air (e.g. backfire of engine) flows at current velocity of 200m/s or above in the direction of sin3 deg. with respect to the flow direction of a fluid to be measured.</p> |
