APPARATUS FOR SUPPLYING CHEMICAL SOLUTION IN THE SEMICONDUCTOR PROCESS,申请号KR19950031492-传众专利搜索

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发明名称	APPARATUS FOR SUPPLYING CHEMICAL SOLUTION IN THE SEMICONDUCTOR PROCESS
摘要
申请公布号	KR0163551(B1)	申请公布日期	1999.02.01
申请号	KR19950031492	申请日期	1995.09.23
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	LEE, HYUN-JAE;LEE, SANG-HO;NAM, CHANG-HYUN
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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