| 摘要 |
PROBLEM TO BE SOLVED: To accurately obtain a true value of the time integration value of acted force by allowing a movable part supported by the guide part of a direct- acting bearing to collide with a force sensor, and by measuring a true force acted on the force sensor according to speed change during the collision. SOLUTION: An entire movable part (movable part) 3 supported by a guide part 2 of a direct-acting bearing is manually moved, and is allowed to collide with a force sensor 4 fixed to a surface plate 6. The time integration value of force acted on the sensor is measured by a measuring instrument (a light wave interferometer, or the like) 8 for measuring the speed of the movable part 3 before and after collision, a measuring instrument (an automatic collimator, or the like) 9 for measuring the attitude of the movable part 3, and a measuring instrument (the automatic collimator, or the like) 10 for measuring the attitude of a guide part 2. Also, a direct-acting static pressure air bearing is used as the direct-acting bearing. Then, a straight line for connecting the center- of-gravity position of the movable part 3 and a collision point 17 is set in parallel with the movable direction of the direct-acting bearing, thus substituting a time integration value of force given to the force sensor 4 as the speed change of the movable part 3 for measuring, and hence achieving accurate measurement.
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