发明名称 Manifold system of removable components for distribution of fluids
摘要 A manifold system for enabling a distribution of fluids includes a plurality of individual manifold blocks that can be joined together to form a gas stick. Each manifold block will have a fluid passage way with an entrance port and exit port accessing a common surface. An active component can be mounted to one manifold block, while extending across a port of an adjacent manifold block. An alignment system can be provided to ensure that the entrance and exit ports are positioned in a plane containing the common surface to facilitate sealing.
申请公布号 US6394138(B1) 申请公布日期 2002.05.28
申请号 US19990229722 申请日期 1999.01.13
申请人 UNIT INSTRUMENTS, INC. 发明人 VU KIM N.;REDEMANN ERIC J.;SHERRIFF DAVID P.
分类号 C23C16/44;F16K11/22;F16K27/00;F16L39/00;H01J37/32;H01L21/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):F16K27/00 主分类号 C23C16/44
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