发明名称 |
Manifold system of removable components for distribution of fluids |
摘要 |
A manifold system for enabling a distribution of fluids includes a plurality of individual manifold blocks that can be joined together to form a gas stick. Each manifold block will have a fluid passage way with an entrance port and exit port accessing a common surface. An active component can be mounted to one manifold block, while extending across a port of an adjacent manifold block. An alignment system can be provided to ensure that the entrance and exit ports are positioned in a plane containing the common surface to facilitate sealing.
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申请公布号 |
US6394138(B1) |
申请公布日期 |
2002.05.28 |
申请号 |
US19990229722 |
申请日期 |
1999.01.13 |
申请人 |
UNIT INSTRUMENTS, INC. |
发明人 |
VU KIM N.;REDEMANN ERIC J.;SHERRIFF DAVID P. |
分类号 |
C23C16/44;F16K11/22;F16K27/00;F16L39/00;H01J37/32;H01L21/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):F16K27/00 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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