| 摘要 |
PROBLEM TO BE SOLVED: To maintain output energy of a laser beam output from an ultraviolet laser device at high energy and to stabilize it by reducing the change of an added gas concentration, such as xenon gas, etc. SOLUTION: The ultraviolet laser device forms a fluorinated passivity film by a fluorinating passivity treatment for bringing an inner wall of case means (laser chamber 11, a filter case 30) for sealing a laser gas and addition gas and the surface brought into contact with the laser beam of the components in case means 11, 30. A ratio of the fluorinated passivity film forming region is of the degree capable of preventing the added gas concentration from being reduced for a predetermined time from the start of a laser oscillation. COPYRIGHT: (C)2005,JPO&NCIPI |
