SPIN COATING METHOD, ITS OPTICAL DISC AND SPIN COATER

摘要

PROBLEM TO BE SOLVED: To provide a spin coating method realizing efficient production by a simple recovery control system by suppressing a reaction of a coating liquid, stabilizing a quality and hardly drying the coating liquid. SOLUTION: An object to be coated is spin coated with the coating liquid in the state that humidity of a treatment atmosphere in the spin coater is humidified to 60% or higher by acidic water of pH<6 and at this time, the acidic water is made to water containing at least one kind or more of an acidic solvent component of the coating liquid. COPYRIGHT: (C)2006,JPO&NCIPI