MAGNESIUM OXIDE SINGLE CRYSTAL AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a magnesium oxide (MgO) single crystal for obtaining an MgO single crystal vapor deposition material which can prevent the occurrence of a splash without reducing the depositing speed when depositing by an electron-beam vapor deposition method or the like, and to provide the MgO single crystal for obtaining an MgO single crystal substrate which can form a superconductor thin film excellent for example in a superconductive characteristic. SOLUTION: The MgO single crystal has a calcium content of 150×10-6to 1,000×10-6kg/kg, and a silicon content of 10×10-6kg/kg or lower, wherein when the polished surface of the MgO single crystal is analyzed by the TOF-SIMS method, the fluctuation of the detection quantity of calcium fragment ions is 30% or less in terms of a CV value. Also provided are an MgO single crystal vapor deposition material and an MgO single crystal substrate for forming a thin film which are obtained from the MgO single crystal. COPYRIGHT: (C)2007,JPO&INPIT