WAFER TRANSFER-RING METHOD OF WAFER CONVEY SYSTEM

摘要

The wafer transmission system comprises a power supply device(1), a transmission control unit(2) a operating plate motor(3), a lifter(4), the charger(5), the pusher(6), a cassette boat sensor and a motor driving unit(8)., The method comprises the steps of: checking whether there is wafer cassette or not; if there is the wafer cassette, sensing the locations of a charger(5) and a wafter cassette (not shown); operating the charger at 10 second-down operation and operating a pusher(6) to a limited height; completing the down operation of the pusher when the pusher and the charger are loaded.