发明名称 Resonance method for production of intense low-impurity ion beams of atoms and molecules
摘要 The present invention comprehends a compact and economical apparatus for producing high intensities of a wide variety of wanted positive and negative molecular and atomic ion beams that have been previously impossible to previously produce at useful intensities. In addition, the invention provides a substantial rejection of companion background ions that are frequently simultaneously emitted with the wanted ions. The principle underlying the present invention is resonance ionization-transfer where energy differences between resonant and non-resonant processes are exploited to enhance or attenuate particular charge-changing processes. This new source technique is relevant to the fields of Accelerator Mass Spectroscopy; Molecular Ion Implantation; Generation of Directed Neutral Beams; and Production of Electrons required for Ion Beam Neutralization within magnetic fields. An example having commercial importance is ionization of the decaborane molecule, B<SUB>10</SUB>H<SUB>14 </SUB>where an almost perfect ionization resonance match occurs between decaborane molecules and arsenic atoms.
申请公布号 US7365340(B2) 申请公布日期 2008.04.29
申请号 US20050185141 申请日期 2005.07.20
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 PURSER KENNETH H.;LITHERLAND ALBERT E.;TURNER NORMAN L.
分类号 H01J7/24 主分类号 H01J7/24
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