发明名称 |
Resonance method for production of intense low-impurity ion beams of atoms and molecules |
摘要 |
The present invention comprehends a compact and economical apparatus for producing high intensities of a wide variety of wanted positive and negative molecular and atomic ion beams that have been previously impossible to previously produce at useful intensities. In addition, the invention provides a substantial rejection of companion background ions that are frequently simultaneously emitted with the wanted ions. The principle underlying the present invention is resonance ionization-transfer where energy differences between resonant and non-resonant processes are exploited to enhance or attenuate particular charge-changing processes. This new source technique is relevant to the fields of Accelerator Mass Spectroscopy; Molecular Ion Implantation; Generation of Directed Neutral Beams; and Production of Electrons required for Ion Beam Neutralization within magnetic fields. An example having commercial importance is ionization of the decaborane molecule, B<SUB>10</SUB>H<SUB>14 </SUB>where an almost perfect ionization resonance match occurs between decaborane molecules and arsenic atoms.
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申请公布号 |
US7365340(B2) |
申请公布日期 |
2008.04.29 |
申请号 |
US20050185141 |
申请日期 |
2005.07.20 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
PURSER KENNETH H.;LITHERLAND ALBERT E.;TURNER NORMAN L. |
分类号 |
H01J7/24 |
主分类号 |
H01J7/24 |
代理机构 |
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主权项 |
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地址 |
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