| 摘要 |
PROBLEM TO BE SOLVED: To realize a linear motor in which at least any one of rolling and pitching is suppressed. SOLUTION: In the linear motor having a pair of guide rails arranged in parallel on the upper surface of a frame at a predetermined interval, and a slider subjected to positional control along these guide rails, each of the pair of guide rails is provided with a means for adjusting the distance between the upper portion of the guide rail and the upper surface of the frame. COPYRIGHT: (C)2008,JPO&INPIT
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