THE PREDICTABLE PROGRAM DEVELOPMENT FOR BEHAVIOR OF THE SELF-MODIFICATION MEMS MACHINE

摘要

A program development capable of expecting conduct of magnetostrictive MEMS operator is provided to reduce design cost by estimating efficiency of MEMS device by using the program. The program enhance reliability of the simulation result by considering elastic energy of magnetostrictive materials. A program development capable of expecting conduct of magnetostrictive MEMS operator comprises an extracting step of magnetostrictive coefficient and a beam element and a plate element which are proposed for finite element method application.