| 摘要 |
According to an embodiment of the present invention, a nozzle jet head module is provided to a nozzle jet system to form a pattern on a substrate. The nozzle jet head module comprises: a module body; a plurality of nozzles mounted in the module body; a plurality of solution supply units provided inside the module body and connected to each nozzle and connection line to supply a solution for forming the pattern on the substrate to each nozzle; and a temperature maintaining unit mounted in the solution supply unit and maintaining the temperature of the solution inside the solution supply unit. According to an embodiment of the present invention, the present invention can maintain the uniform temperature of the solution inside the solution supply unit to maintain a uniform viscosity of the solution provided from the nozzle to form the pattern on the substrate, thereby improving reliability of formation of the pattern on the substrate. |
