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发明名称
Verfahren zum Bilden von Isolierfilmen
摘要
申请公布号
DE1962244(A1)
申请公布日期
1970.07.02
申请号
DE19691962244
申请日期
1969.12.11
申请人
FUJITSU LTD.
发明人
JUNJI SATO,DIPL.-ING.
分类号
B23Q3/00;C23C16/40;H01L21/316
主分类号
B23Q3/00
代理机构
代理人
主权项
地址
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