| 摘要 |
PURPOSE:To obtain a sufficiently-high Q value, and to improve mechanical reliability by thermally pressure-fixing a through hole provided to either upper or lower case with a metal piece. CONSTITUTION:Oscillating reed 3 is supported between upper case 7 and lower case 8, which are connected each other by metal welding or glass paste 4 and made airtight. Either upper case 7 or lower case 8 is provided with at least one through hole 9, around which metal film 11 is adhered by being vapor-deposited or sputtered. Then, metal piece 13 is placed on through hole 9 and after inner gas is removed under vacuum, thermal pressure fixing between metal piece 13 and metal film 6 is done, thereby attaining vacuum sealing. In this way, the degree of vacuum is maintained at high without discharging gas at the time of sealing, so that a sufficiently-high Q value and high mechanical reliability can be obtained at the same time. |
